Gas-Phase Deposition of Low Dielectric Polymers

Award Information
Agency:
Department of Defense
Branch
Missile Defense Agency
Amount:
$60,000.00
Award Year:
1995
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Agency Tracking Number:
28356
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Advanced Technology Materials
7 Commerce Dr, Danbury, CT, 06810
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Thomas H. Baum
(203) 794-1100
Business Contact:
() -
Research Institution:
n/a
Abstract
Phase I will develop a gas-phase process for the deposition of low dielectric constant polymers for use in integrated circuits. This process will utilize the firm's liquid delivery technology to deliver the reactants and grow films at high deposition rates. Polymerization will be induced by thermal activation on a heated substrate. This novel approach to polymeric film growth enables the deposition of a wide variety of polymers displaying low dielectric constants. This technique has broad applications for IC packaging, lithography and microelectronics processing.

* information listed above is at the time of submission.

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