STTR Phase II: Diamond Nanoprobes for Atomic Force Microscopy - Imaging, Metrology, Material Property Measurement, Process Control, and Manipulation with Ultrahigh Performanc

Award Information
Agency:
National Science Foundation
Branch:
N/A
Amount:
$499,739.00
Award Year:
2008
Program:
STTR
Phase:
Phase II
Contract:
0823002
Agency Tracking Number:
0638030
Solicitation Year:
2006
Solicitation Topic Code:
MI
Solicitation Number:
NSF 06-553
Small Business Information
ADVANCED DIAMOND TECHNOLOGIES
429 B Weber Road, # 286, Romeoville, IL, 60446
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
143371388
Principal Investigator
 John Carlisle
 PhD
 (815) 293-0900
 carlisle@thindiamond.com
Business Contact
 John Carlisle
Title: PhD
Phone: (815) 293-0900
Email: carlisle@thindiamond.com
Research Institution
 University of Pennsylvania
 Robert Carpick
 3451 Walnut Street
Philadelphia, PA, 19104 6205
 (215) 898-4608
 Nonprofit college or university
Abstract
This STTR Phase II project will develop commercially viable atomic force microscope (AFM) probes fabricated from ultrananocrystalline diamond. The project will refine the processes developed in Phase I and bring contact and non-contact all-diamond probes to market. Probes using conducting diamond that are chemically and electronically tunable and have superb tribological properties will also be developed. This work will facilitate new industrial applications for AFM, including high-throughput imaging, metrology, and characterization of large quantities of materials, local electrical characterization for process control in micro/nanoelectronics, nanomechanical characterization of MEMS/NEMS devices, and ultraprecise hard mask correction for the micro/nanolithography industry.

* information listed above is at the time of submission.

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