STTR Phase II: Diamond Nanoprobes for Atomic Force Microscopy - Imaging, Metrology, Material Property Measurement, Process Control, and Manipulation with Ultrahigh Performanc

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$499,739.00
Award Year:
2008
Program:
STTR
Phase:
Phase II
Contract:
0823002
Award Id:
84891
Agency Tracking Number:
0638030
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
429 B Weber Road, # 286, Romeoville, IL, 60446
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
143371388
Principal Investigator:
JohnCarlisle
PhD
(815) 293-0900
carlisle@thindiamond.com
Business Contact:
JohnCarlisle
PhD
(815) 293-0900
carlisle@thindiamond.com
Research Institute:
University of Pennsylvania
Robert Carpick
3451 Walnut Street
Philadelphia, PA, 19104 6205
(215) 898-4608
Nonprofit college or university
Abstract
This STTR Phase II project will develop commercially viable atomic force microscope (AFM) probes fabricated from ultrananocrystalline diamond. The project will refine the processes developed in Phase I and bring contact and non-contact all-diamond probes to market. Probes using conducting diamond that are chemically and electronically tunable and have superb tribological properties will also be developed. This work will facilitate new industrial applications for AFM, including high-throughput imaging, metrology, and characterization of large quantities of materials, local electrical characterization for process control in micro/nanoelectronics, nanomechanical characterization of MEMS/NEMS devices, and ultraprecise hard mask correction for the micro/nanolithography industry.

* information listed above is at the time of submission.

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