STTR Phase I: Piezoelectric/diamond RF MEMS filters for mobile wireless applications

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 0930676
Agency Tracking Number: 0930676
Amount: $149,962.00
Phase: Phase I
Program: STTR
Awards Year: 2009
Solicitation Year: 2007
Solicitation Topic Code: MM
Solicitation Number: NSF 06-598
Small Business Information
429 B Weber Road, # 286, Romeoville, IL, 60446
DUNS: 143371388
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 John Carlisle
 PhD
 (815) 293-0900
 carlisle@thindiamond.com
Business Contact
 John Carlisle
Title: PhD
Phone: (815) 293-0900
Email: carlisle@thindiamond.com
Research Institution
 Oklahoma State University
 Reza Abdolvarid
 700 North Greenwood Ave
103 Hatrc
Tulsa, OK, 74106 1103
 (815) 293-0900
 Nonprofit college or university
Abstract
This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5). This Small Business Technology Transfer Phase I project will develop ultrananocrystalline diamond (UNCD?) as a high frequency structural layer for piezoelectrically-transduced micromachined RF resonators for MHz-GHz applications in wireless telecommunication systems. Diamond, in theory, is the ideal RF MEMS resonator material, having the extreme bulk properties of high acoustic velocity, hardness, thermal stability, and linearity, combined with the surface properties of low stiction and desirable surface chemistry. Diamond MEMS resonators can enable MEMS RF devices for civilian and military applications and allow for the direct integration of MEMS with microelectronics. With the potential for 100? reduction in size and power consumption relative to existing technologies while extending the performance of ""radio on a chip"" systems into the GHz, the RF MEMS market is forecasted at $1.1 billion by 2010.

* Information listed above is at the time of submission. *

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