IN-SITU INTERFACIAL TEMPERATURE DETERMINATION DURING MICROMACHING

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$64,883.00
Award Year:
1994
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
27547
Agency Tracking Number:
27547
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Advanced Fuel Research Inc. (Currently ADVANCED FUEL RESEARCH, INC.)
Po Box 380379, East Hartford, CT, 06138
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
James R Markham
(203) 528-9806
Business Contact:
() -
Research Institution:
n/a
Abstract
RESEARCHERS HAVE PIONEERED A TECHNIQUE TO DETERMINE TEMPERATURES ALONG A LINE-OF-SIGHT INTO TRANSPARENT MATERIALS. IT INVOLVES MEASURING INFRARED RADIANCE SPECTRA FOR MATERIALS WITH WELL-CHARACTERIZED, TEMPERATURE-DEPENDENT OPTICAL CONSTANTS. THE PROJECT DEMONSTRATES THAT FOURIER TRANSFORM INFRARED (FT-IR) RADIANCE SPECTRA CAN BE USED TO EXTRACT THE AVERAGE TEMPERATURE AT THE SLURRY-SAMPLE INTERFACE DURING MICROMACHINING PROCESSES. FEASIBILITY IS DEMONSTRATED BY PERFORMING FT-IR RADIANCE MEASUREMENTS THROUGH SAMPLES TO THE SLURRY INTERFACE, FOR TWO SYSTEMS: COLLOIDAL SILICA LAPPING OF SAPPHIRE, AND DIAMOND LAPPING OF SILICON. THE LATTER CASE REPRESENTS THE DICING OF SILICON WAFERS. AN ON-LINE PROCESS MONITOR IS BEING DEVELOPED FOR THE MICROMACHINING OF SINGLE-CRYSTAL CERAMICS AS WELL AS TO INCREASE UNDERSTANDING OF THE PROCESSES INVOLVED.

* information listed above is at the time of submission.

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