IN-SITU INTERFACIAL TEMPERATURE DETERMINATION DURING MICROMACHING

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: N/A
Agency Tracking Number: 27547
Amount: $64,883.00
Phase: Phase I
Program: SBIR
Awards Year: 1994
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Po Box 380379, East Hartford, CT, 06138
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 James R Markham
 (203) 528-9806
Business Contact
Phone: () -
Research Institution
N/A
Abstract
RESEARCHERS HAVE PIONEERED A TECHNIQUE TO DETERMINE TEMPERATURES ALONG A LINE-OF-SIGHT INTO TRANSPARENT MATERIALS. IT INVOLVES MEASURING INFRARED RADIANCE SPECTRA FOR MATERIALS WITH WELL-CHARACTERIZED, TEMPERATURE-DEPENDENT OPTICAL CONSTANTS. THE PROJECT DEMONSTRATES THAT FOURIER TRANSFORM INFRARED (FT-IR) RADIANCE SPECTRA CAN BE USED TO EXTRACT THE AVERAGE TEMPERATURE AT THE SLURRY-SAMPLE INTERFACE DURING MICROMACHINING PROCESSES. FEASIBILITY IS DEMONSTRATED BY PERFORMING FT-IR RADIANCE MEASUREMENTS THROUGH SAMPLES TO THE SLURRY INTERFACE, FOR TWO SYSTEMS: COLLOIDAL SILICA LAPPING OF SAPPHIRE, AND DIAMOND LAPPING OF SILICON. THE LATTER CASE REPRESENTS THE DICING OF SILICON WAFERS. AN ON-LINE PROCESS MONITOR IS BEING DEVELOPED FOR THE MICROMACHINING OF SINGLE-CRYSTAL CERAMICS AS WELL AS TO INCREASE UNDERSTANDING OF THE PROCESSES INVOLVED.

* Information listed above is at the time of submission. *

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