IN-SITU INTERFACIAL TEMPERATURE DETERMINATION DURING MICROMACHING

Award Information
Agency:
National Science Foundation
Branch:
N/A
Amount:
$64,883.00
Award Year:
1994
Program:
SBIR
Phase:
Phase I
Contract:
N/A
Agency Tracking Number:
27547
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Advanced Fuel Research Inc.
Po Box 380379, East Hartford, CT, 06138
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
N/A
Principal Investigator
 James R Markham
 (203) 528-9806
Business Contact
Phone: () -
Research Institution
N/A
Abstract
RESEARCHERS HAVE PIONEERED A TECHNIQUE TO DETERMINE TEMPERATURES ALONG A LINE-OF-SIGHT INTO TRANSPARENT MATERIALS. IT INVOLVES MEASURING INFRARED RADIANCE SPECTRA FOR MATERIALS WITH WELL-CHARACTERIZED, TEMPERATURE-DEPENDENT OPTICAL CONSTANTS. THE PROJECT DEMONSTRATES THAT FOURIER TRANSFORM INFRARED (FT-IR) RADIANCE SPECTRA CAN BE USED TO EXTRACT THE AVERAGE TEMPERATURE AT THE SLURRY-SAMPLE INTERFACE DURING MICROMACHINING PROCESSES. FEASIBILITY IS DEMONSTRATED BY PERFORMING FT-IR RADIANCE MEASUREMENTS THROUGH SAMPLES TO THE SLURRY INTERFACE, FOR TWO SYSTEMS: COLLOIDAL SILICA LAPPING OF SAPPHIRE, AND DIAMOND LAPPING OF SILICON. THE LATTER CASE REPRESENTS THE DICING OF SILICON WAFERS. AN ON-LINE PROCESS MONITOR IS BEING DEVELOPED FOR THE MICROMACHINING OF SINGLE-CRYSTAL CERAMICS AS WELL AS TO INCREASE UNDERSTANDING OF THE PROCESSES INVOLVED.

* information listed above is at the time of submission.

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