Whole Wafer Thermal Imaging for Real-Time Process Monitoring and Control

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 9860186
Agency Tracking Number: 9860186
Amount: $99,816.00
Phase: Phase I
Program: SBIR
Awards Year: 1999
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
87 Church Street, East Hartford, CT, 06108
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Harri Latvakoski
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* Information listed above is at the time of submission. *

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