Rapid Thermal Annealing Process with Real-Time Monitoring for SiO2 Layer Formation

Award Information
Agency:
Department of Defense
Branch
Defense Advanced Research Projects Agency
Amount:
$99,886.00
Award Year:
1994
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
26673
Agency Tracking Number:
26673
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
P.o. Box 380379, 87 Church, Street, East Hartford, CT, 06138
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Peter Solomon
(203) 528-9806
Business Contact:
() -
Research Institution:
n/a
Abstract
N/A

* information listed above is at the time of submission.

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