In-Line Process Monitoring and Control for Poly-Silicon Formation Inside Cluster Tools

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$299,944.00
Award Year:
1997
Program:
SBIR
Phase:
Phase II
Contract:
9460472
Agency Tracking Number:
29874
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Advanced Fuel Research, Inc.
87 Church Street, East Hartford, CT, 06108
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Peter Rosenthal
() -
Business Contact:
() -
Research Institution:
n/a
Abstract
N/A

* information listed above is at the time of submission.

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