In-Line Process Monitoring and Control for Poly-Silicon Formation Inside Cluster Tools

Award Information
Agency:
National Science Foundation
Amount:
$299,944.00
Program:
SBIR
Contract:
9460472
Solitcitation Year:
N/A
Solicitation Number:
N/A
Branch:
N/A
Award Year:
1997
Phase:
Phase II
Agency Tracking Number:
29874
Solicitation Topic Code:
N/A
Small Business Information
Advanced Fuel Research, Inc.
87 Church Street, East Hartford, CT, 06108
Hubzone Owned:
N
Woman Owned:
N
Socially and Economically Disadvantaged:
N
Duns:
N/A
Principal Investigator
 Peter Rosenthal
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

Agency Micro-sites

US Flag An Official Website of the United States Government