SBIR Phase I: High-Speed, In-Line Gas Monitoring for Control of Gas Mixing in Chemical Vapor Deposition (CVD) Systems

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 9660463
Agency Tracking Number: 35447
Amount: $74,889.00
Phase: Phase I
Program: SBIR
Awards Year: 1997
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
87 Church Street, PO Box 38037, East Hartford, CT, 06138
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Chad Nelson
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* Information listed above is at the time of submission. *

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