COMMERCIAL SAPPHIRE SURFACES CONTAIN BURIED DAMAGE WHICH HAS A DELETERIOUS INFLUENCE ON SOS LAYERS GROWN THEREON.

Award Information
Agency:
Department of Defense
Branch
Defense Threat Reduction Agency
Amount:
$50,000.00
Award Year:
1984
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Agency Tracking Number:
938
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Advanced Research & Applctns
1223 East Arques Avenue, Sunnyvale, CA, 94086
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
T. J. MAGEE
(408) 733-7780
Business Contact:
() -
Research Institution:
n/a
Abstract
COMMERCIAL SAPPHIRE SURFACES CONTAIN BURIED DAMAGE WHICH HAS A DELETERIOUS INFLUENCE ON SOS LAYERS GROWN THEREON. THE DEFECTS IN THE SILICON LAYERS RESULT IN A REDUCED YIELD OF DEVICES AND PERFORMANCE LIMITATIONS. MUCH OF THE DAMAGE IN THE SAPPHIRE SURFACE IS PRODUCED BY THE POLISHING STEP, WHICH EMPLOYS AN ABRASIVE PAD IN CONTACT WITH THE SAPPHIRE SURFACE. AN IMPROVED POLISHING PROCESS HAS BEEN EVALUATED WHICH DOES NOT REQUIRE CONTACT WITH THE SAPPHIRE SURFACE. AN EVALUATION OF SI FILMS GROWN ON SAPPHIRE SUBSTRATES POLISHED BY THIS NON-CONTACT PROCEDURE REVEALS THAT DISLOCATION AND STACKING FAULTS DENSITIES ARE SUBSTANTIALLY REDUCED COMPARED TO THE BEST COMMERCIAL SOS WAFERS. THE LABORATORY APPARATUS ASSEMBLED FOR THE INITIAL EXPERIMENTS IS INADEQUATE FOR PRODUCTION APPLICATIONS SINCE THE THROUGHPUT IS VERY LOW AND OPERATION REQUIRES CONSIDERABLE ATTENTION. WE PROPOSE TO EVALUATE THE FEASIBILITY OF A LARGER PRODUCTION-ORIENTEDMACHINE, TO CONDUCT DESIGN TRADEOFFS AND TO PREPARE A FINAL CONCEPTUALDESIGN OF A CAPABILITY AUTOMATED MACHINE WITH A MUTIPLE-SUBSTRATE.

* information listed above is at the time of submission.

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