The High Rate Vacuum Deposition of Highly Conductive Transparent Oxides

Award Information
Agency:
Department of Defense
Branch
Missile Defense Agency
Amount:
$64,960.00
Award Year:
2001
Program:
SBIR
Phase:
Phase I
Contract:
DASG60-01-P-0090
Award Id:
53131
Agency Tracking Number:
01-0273
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
12110 E Slauson Ave #12, Santa Fe Springs, CA, 90670
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
018408943
Principal Investigator:
MazherMalik
Engineering Manager
(562) 907-4636
malik@atfilminc.com
Business Contact:
M.Al-Hakeem
President
(562) 907-4636
ATFILMINC@MSN.com
Research Institute:
n/a
Abstract
Transparent Conducting Oxide (TCO) coatings play a crucial role in both photovoltaicand display technologies. In the latter technology TCO's provide a conductiveelectrode that is also transparent to the light emitted from the underlying displaywhile, in the former technology, TCO's allow light to pass through the electrode tothe underlying semiconductor that converts the light into electron-hole pairs.Despite the commercial need, the process control has been limited by the traditionalvacuum deposition method of reactive magnetron sputtering that is pretty muchstandard for TCO deposition in the industry. Sputtering is simple to implement and,in fact, generally produces higher quality TCO films than can be produced withtraditional evaporation methods, but it is a very slow deposition rate process.Plasma injection designs analogous to the HAD process will be tested as a baselinecondition. The ability to really drive the rate up is going to depend not just on thereactivity of the metal and oxygen species and available surface energy(i.e. the degree of ionization and radical density).It will also depend critically on the intimacy of the flux mixture as thecombined flux strikes the substrate. This will require designing both theplasma and metal sources to direct the flux in very specific ways.Transparent Conducting Oxide (TCO) coatings play a crucial role in both photovoltaicand display technologies. In the latter technology TCO's provide a conductiveelectrode that is also transparent to the light emitted from the underlying displaywhile, in the former technology, TCO's allow light to pass through the electrode tothe underlying semiconductor that converts the light into electron-hole pairs.TCO's are also very useful materials for fabrication of transparent, anti-static,packaging and

* information listed above is at the time of submission.

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