PATTERNED ETCHING OF INFRARED DETECTOR ARRAYS

Award Information
Agency:
Department of Defense
Branch
Army
Amount:
$59,890.00
Award Year:
1990
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
12183
Agency Tracking Number:
12183
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
45 Manning Rd, Billercia, MA, 01821
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Andrew Freedman
(508) 663-9500
Business Contact:
() -
Research Institute:
n/a
Abstract
WE PROPOSE TO DEVELOP A PATTERNED ETCHING TECHNIQUE FOR INFRARED DETECTOR ARRAYS BASED ON PHOTO-INDUCED ETCHING OF HGCDTE THAT IS COMPATIBLE WITH THE ULTRA-HIGH VACUUM ENVIRONMENT OF A MOLECULAR BEAM EPITAXY APPARATUSES. THE PHASE I RESEARCH FOCUSES ON ESTABLISHING THE EFFICACY OF SUITABLE GAS PHASE PRECURSORS FOR THE ETCHING PROCESS. IF THE PHASE I RESEARCH IS SUCCESSFUL, OPTICAL PROJECTION TECHNIQUES WILL BE USED TO PRODUCE ARRAY STRUCTURES. SIMILAR TECHNIQUES MAY BE SUITABLE FOR MAKING OHMIC CONTACTS TO THE MESAS FORMED BY THE ETCHING STEP.

* information listed above is at the time of submission.

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