PATTERNED ETCHING OF INFRARED DETECTOR ARRAYS

Award Information
Agency: Department of Defense
Branch: Army
Contract: N/A
Agency Tracking Number: 12183
Amount: $59,890.00
Phase: Phase I
Program: SBIR
Awards Year: 1990
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Aerodyne Research Inc
45 Manning Rd, Billercia, MA, 01821
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Andrew Freedman
 (508) 663-9500
Business Contact
Phone: () -
Research Institution
N/A
Abstract
WE PROPOSE TO DEVELOP A PATTERNED ETCHING TECHNIQUE FOR INFRARED DETECTOR ARRAYS BASED ON PHOTO-INDUCED ETCHING OF HGCDTE THAT IS COMPATIBLE WITH THE ULTRA-HIGH VACUUM ENVIRONMENT OF A MOLECULAR BEAM EPITAXY APPARATUSES. THE PHASE I RESEARCH FOCUSES ON ESTABLISHING THE EFFICACY OF SUITABLE GAS PHASE PRECURSORS FOR THE ETCHING PROCESS. IF THE PHASE I RESEARCH IS SUCCESSFUL, OPTICAL PROJECTION TECHNIQUES WILL BE USED TO PRODUCE ARRAY STRUCTURES. SIMILAR TECHNIQUES MAY BE SUITABLE FOR MAKING OHMIC CONTACTS TO THE MESAS FORMED BY THE ETCHING STEP.

* information listed above is at the time of submission.

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