LASER BASED METHYL RADICAL MONITORING FOR PROCESS CONTROL IN DIAMOND CVD DEPOSITION

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: N/A
Agency Tracking Number: 15153
Amount: $60,000.00
Phase: Phase I
Program: SBIR
Awards Year: 1991
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Aerodyne Research Inc
45 Manning Road, Billerica, MA, 01821
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Paul Kebabian
 Principal Investigator
 (508) 663-9500
Business Contact
Phone: () -
Research Institution
N/A
Abstract
THE METHYL RADICAL IS A KEY SPECIES IN THE FORMATION OF CVD DIAMOND, FOR WHICH THERE IS A NEED FOR AN ON-LINE MONITOR USABLE IN INDUSTRIAL PRODUCTION OF CVD DIAMOND. WE PROPOSE TO MONITORMETHYL RADICAL CONCENTRATIONS USING THE ABSORPTION OF THE INFRARED OUTPUT OF A NEUTRAL XENON LASER AT 3217.75 WAVENUMBERS. THE PHASE I EXPERIMENTS WILL MEASURE THIS ABSORPTION IN AN RF METHANE PLASMA, IN WHICH METHYL RADICAL CONCENTRATION IS MEASURED USING A PREVIOUSLY CALIBRATED ABSORPTION LINE NEAR 608 WAVENUMBERS. ANTICIPATED BENEFITS/POTENTIAL COMMERCIAL APPLICATIONS - THE PROPOSED METHYL RADICAL MONITOR WOULD BE USED FOR ON-LINE QUALITY CONTROL OF THE DIAMOND DEPOSITION PROCESS. USING OTHER LASER LINES, A SIMILAR MONITOR COULD BE USED FOR OTHER MOLECULAR SPECIES.

* information listed above is at the time of submission.

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