LASER BASED METHYL RADICAL MONITORING FOR PROCESS CONTROL IN DIAMOND CVD DEPOSITION

Award Information
Agency:
Department of Defense
Branch
Defense Advanced Research Projects Agency
Amount:
$60,000.00
Award Year:
1991
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
15153
Agency Tracking Number:
15153
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
45 Manning Road, Billerica, MA, 01821
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Paul Kebabian
Principal Investigator
(508) 663-9500
Business Contact:
() -
Research Institute:
n/a
Abstract
THE METHYL RADICAL IS A KEY SPECIES IN THE FORMATION OF CVD DIAMOND, FOR WHICH THERE IS A NEED FOR AN ON-LINE MONITOR USABLE IN INDUSTRIAL PRODUCTION OF CVD DIAMOND. WE PROPOSE TO MONITORMETHYL RADICAL CONCENTRATIONS USING THE ABSORPTION OF THE INFRARED OUTPUT OF A NEUTRAL XENON LASER AT 3217.75 WAVENUMBERS. THE PHASE I EXPERIMENTS WILL MEASURE THIS ABSORPTION IN AN RF METHANE PLASMA, IN WHICH METHYL RADICAL CONCENTRATION IS MEASURED USING A PREVIOUSLY CALIBRATED ABSORPTION LINE NEAR 608 WAVENUMBERS. ANTICIPATED BENEFITS/POTENTIAL COMMERCIAL APPLICATIONS - THE PROPOSED METHYL RADICAL MONITOR WOULD BE USED FOR ON-LINE QUALITY CONTROL OF THE DIAMOND DEPOSITION PROCESS. USING OTHER LASER LINES, A SIMILAR MONITOR COULD BE USED FOR OTHER MOLECULAR SPECIES.

* information listed above is at the time of submission.

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