ATOMIC LAYER EPITAXY OF DIAMOND FILMS

Award Information
Agency:
Department of Defense
Branch
Missile Defense Agency
Amount:
$500,000.00
Award Year:
1992
Program:
SBIR
Phase:
Phase II
Contract:
n/a
Agency Tracking Number:
15607
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Aerodyne Research Inc.
45 Manning Road, Billerica, MA, 01821
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Dr Andrew Freedman
Principal Investigator
(508) 663-9500
Business Contact:
() -
Research Institution:
n/a
Abstract
WE ARE DEVELOPING A MOLECULAR BEAM EPITAXY APPROACH TO GROW EPITAXIAL DIAMOND THIN FILMS FOR ELECTRONIC DEVICES. WITH HALOGEN ATOMS AND HALOCARBON FREE RADICALS TO CONTROL THE DEPOSITION WE WILL OVERCOME THE PROPENSITY OF TYPICAL DIAMOND DEPOSITION PROCESSES TO GROW 3-DIMENSIONAL MICRO-CRYSTALLINE FILMS. IT THIS PROJECT SUCCEEDS, WE WILL DEVELOP A HIGH-SPEEED AND/OR HIGH POWER ELECTRONIC DEVICE TECHNOLOGY FROM DIAMOND FILMS.

* information listed above is at the time of submission.

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