ATOMIC CHLORINE SOURCE FOR SEMICONDUCTOR ETCHING STUDIES

Award Information
Agency:
National Science Foundation
Branch:
N/A
Amount:
$40,000.00
Award Year:
1987
Program:
SBIR
Phase:
Phase I
Contract:
N/A
Agency Tracking Number:
5198
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Aerodyne Research Inc.
45 Manning Rd, Billerica, MA, 01821
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
N/A
Principal Investigator
 () -
Business Contact
 DR. STINESPRING
Title: RESEARCHH SCIENTIST
Phone: () -
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

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