Micro-Scale Quadrupole Mass Spectrometer

Award Information
Agency:
Department of Commerce
Branch
National Institute of Standards and Technology
Amount:
$75,000.00
Award Year:
2003
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Agency Tracking Number:
307-26
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Aerophysics, Inc.
30981 Woodbrush Road, Calument, MI, 49913
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Satwik Deshmukh
() -
Business Contact:
() -
Research Institution:
n/a
Abstract
The proposed research comprises design, analysis, and ultimate fabrication and operation of a microfabricated array of quadrupole mass spectrometers (QMS). The design capitalizes on recent advances in micro-electro-mechanical systems (MEMS) and molecular-beam-epitaxy (MBE) technology so that the device can be mass-produced on a chip. In addition to analyzing a single element QMS in Phase 1, investigators will pursue architectures for multiplexing this geometry to a micromachined array of QMS on a single chip (mAQMS). The analyses of feasibility and expected performance of mAQMS will be guided by the proposing team's demonstrated success in developing similar micro-machined quadrupole ion traps. By implementing the quadrupole element in a massively parallel array, it may be possible to either individually tune filter elements to dedicated mass species allowing real-time sampling and circumventing the need for timely scans, or increase the detection efficiency of the micro-array by simultaneously sampling a given mass with a large number of individual detectors and filters.

* information listed above is at the time of submission.

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