SBIR Phase I: Minature RF/MEMS (Micro Electro-Mechanical Systems) Absolute Pressure Transducer

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$99,753.00
Award Year:
2003
Program:
SBIR
Phase:
Phase I
Contract:
0319845
Award Id:
63679
Agency Tracking Number:
0319845
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
46 Jonspin Road, Wilmington, MA, 01887
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
KevinKnopp
() -
Business Contact:
() -
Research Institute:
n/a
Abstract
This Small Business Innovation Research (SBIR) Phase I project proposes the development of an entirely new MEMS (Micro Electro-Mechanical Systems) pressure sensor architecture that is capable of providing a combination of sensitivity and dynamic range much beyond the state-of-the-art. The sensor structure is made small and light enough to be able to move under the influence of the pressure bombardment in a manner that can be recorded by phase sensitive electronics. The differential pressure is eliminated so that there is no net average force on the transducer membrane and hence no DC term in the output. A purely electrical measurement technique that exploits the change in the structure's capacitance as the membrane moves will be used. The proposed detection approach is a phase measurement technique; promising very high sensitivity and noise immunity. The worldwide market for compact pressure sensors is in excess of $2.5B and extends from low-cost consumer products to high-end scientific and military systems. For all applications, low-cost, small-size, and especially low power dissipation are essential.

* information listed above is at the time of submission.

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