Removing Mid-Spatial Frequency Errors with VIBE
Small Business Information
Optimax Systems, Inc.
6367 Dean Parkway, Ontario, NY, 14519-8939
AbstractThe Optimax VIBE process is a full-aperture, conformal polishing process incorporating high frequency motion that rapidly removes sub-surface damage in a VIBE pre-polish step and eliminates mid-spatial frequency (MSF) errors created by deterministic polishing in a VIBE finishing step. This Phase I feasibility study will focus on the VIBE finishing step to remove undesirable MSF errors while at the same time maintaining the desired low spatial frequency form accuracy.
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