Low-Cost Fabrication of an Integrated, Self-Sufficient MEMS Skin

Award Information
Agency:
National Aeronautics and Space Administration
Branch
n/a
Amount:
$69,995.00
Award Year:
2003
Program:
SBIR
Phase:
Phase I
Contract:
NAS1-03038
Award Id:
63599
Agency Tracking Number:
024487
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
6 Skyline Dr., Hawthorne, NY, 10532
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Marc Zemel
(914) 345-2442
mzemel@anvik.com
Business Contact:
Zachary Cosentino
Business Official
(914) 345-2442
zcosentino@anvik.com
Research Institute:
n/a
Abstract
One of the ultimate goals of sensor research is to build an integrated unit that harnesses its energy from its surroundings and reacts to, and transmits, any changes in its environment in a predictable and reliable manner. There are several components to this universal goal of a self-contained sensor unit: the power module, the sensor module, the control module, and the transmission module. The goal of this proposal is to develop a whole class of truly stand-alone, large-area, distributed sensor systems on a flexible substrate ? a MEMS skin. We propose to use a two-layer flexible substrate. The first would be a copper-on-flex substrate that acts as the interconnect layer for power distribution. The second is a Si-on-flex substrate that contains the power, sensor and circuit systems. This layer would utilize a thin film amorphous Si solar cell, integrated with Anvik?s technology to integrate MEMS and IC devices. The two substrate layers would be connected using micro-via patterns in the Si-on-flex layer that can be generated using Anvik?s photo-ablation systems. Finally, using Anvik?s large-area processing capabilities we will extend this process to create a distributed sensor array that could be used in spacecraft ?health-monitoring? applications.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government