Maskless Nanolithography with Sub-Pixel Resolution for Microelectronics and Biomolecular Devices

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: W31P4Q-04-C-R102
Agency Tracking Number: 03SB2-0439
Amount: $98,993.00
Phase: Phase I
Program: SBIR
Awards Year: 2004
Solicitation Year: 2003
Solicitation Topic Code: SB032-045
Solicitation Number: 2003.2
Small Business Information
6 Skyline Drive, Hawthorne, NY, 10532
DUNS: 796359289
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: Y
Principal Investigator
 Marc Klosner
 Research Staff member
 (914) 345-2442
Business Contact
 Kanti Jain
Title: President
Phone: (914) 345-2442
Research Institution
Maskless technology capable of sub-100 nm patterning is attractive for manufacturing of many microelectronic and biomolecular devices. In numerous military applications, the number of different types of electronic modules required is large, whereas the quantities needed of each type of module are small, making the mask costs prohibitive. Previous maskless lithography approaches of imaging a spatial light modulator array by a reduction lens are fundamentally limited in resolution by an individual micromodulator size and put great demands on the projection lens. Thus, a maskless technology would be highly desirable that overcomes the basic limitation of the micromodulator pixel size (14-16 µm) and the projection lens reduction ratio (100-200), and is configurable as a massively parallel scanning system, thereby delivering moderate throughputs (2-10 wafers (200 mm) per hour) at very high resolutions (50-100 nm). This proposal presents such a technology: a novel sub-pixel maskless nanolithography system that provides the capability to pattern very high-resolution features without using a physical mask; enables rapid programmability of the patterns to be imaged for quick prototyping and moderate-volume production; and provides high-throughput imaging on large areas. This system will be attractive for numerous military as well as commercial applications in microelectronics and biotechnology.

* Information listed above is at the time of submission. *

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