ATOMIC LAYER CVD OF YBACUO OVER A LOW DIELECTRIC SUBSTRATE

Award Information
Agency:
National Aeronautics and Space Administration
Branch
n/a
Amount:
$49,940.00
Award Year:
1990
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Agency Tracking Number:
11890
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Apa Optics, Inc.
2950 N.e. 84th Lane, Blaine, MN, 55434
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
M. Asif Khan
Vice President, Optoelectronic
(612) 784-4995
Business Contact:
ANIL K. JAIN
PRESIDENT
(612) 784-4995
Research Institution:
n/a
Abstract
WE PROPOSE THE DEPOSITION OF HIGH TC YBACUO LAYERS, USING ATOMIC LAYER CVD OVER A COMPOSITE ALXGA1-XAS/ALXGA1-XN/SAPPHIRE SUBSTRATE. THE UNIQUE ATOMIC LAYER PROCESS IS EXPECTED TO REDUCE THE EPITAXY TEMPERATURE WELL BELOW THAT REQUIRED FOR CONVENTIONAL MOCVD. THIS WILL ELIMINATE THE NEED FOR A POST DEPOSITION ANNEAL. OUR SUBSTRATE STACK IS ALSO UNIQUE. IT HAS A DIELECTRIC CONSTANT MUCH LOWER AND THERMAL CONDICTIVITY AND MECHANICAL STRENGTH MUCH SUPERIOR THAN GAAS. PHASE I EFFORT WILL THEREFORE LEAD TO A MULTILAYER STACK WELL SUITED FOR FABRICATION OF HIGH FREQUENCY LOW LOSS MMIC CIRCUITS WITH SUPERCONDUCTOR ELECTRODES. THE SIX MONTH PHASE I PROGRAM WILL SIGNIFICANTLY BENEFIT FROM OUR RELATED WORK ON HTC SUPERCONDUCTOR DEPOSITION AND SINGLE CRYSTAL MULTILAYER ALXGA1-XAS/ALXGA1-XN DEPOSITIONS OVER SAPPHIRE SUBSTRATES. THE RESULTING FILMS WILL BE CHARACTERIZED FOR THEIR SUPERCONDUCTING TRANSITION TEMPERATURES. PHASE II WILL FOCUS ON THE FABRICATION OF INTEGRATED MMIC DEVICES.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government