ATOMIC LAYER CVD OF YBACUO OVER A LOW DIELECTRIC SUBSTRATE

Award Information
Agency:
National Aeronautics and Space Administration
Branch
n/a
Amount:
$49,940.00
Award Year:
1990
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Agency Tracking Number:
11890
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Apa Optics, Inc.
2950 N.e. 84th Lane, Blaine, MN, 55434
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
M. Asif Khan
Vice President, Optoelectronic
(612) 784-4995
Business Contact:
ANIL K. JAIN
PRESIDENT
(612) 784-4995
Research Institution:
n/a
Abstract
WE PROPOSE THE DEPOSITION OF HIGH TC YBACUO LAYERS, USING ATOMIC LAYER CVD OVER A COMPOSITE ALXGA1-XAS/ALXGA1-XN/SAPPHIRE SUBSTRATE. THE UNIQUE ATOMIC LAYER PROCESS IS EXPECTED TO REDUCE THE EPITAXY TEMPERATURE WELL BELOW THAT REQUIRED FOR CONVENTIONAL MOCVD. THIS WILL ELIMINATE THE NEED FOR A POST DEPOSITION ANNEAL. OUR SUBSTRATE STACK IS ALSO UNIQUE. IT HAS A DIELECTRIC CONSTANT MUCH LOWER AND THERMAL CONDICTIVITY AND MECHANICAL STRENGTH MUCH SUPERIOR THAN GAAS. PHASE I EFFORT WILL THEREFORE LEAD TO A MULTILAYER STACK WELL SUITED FOR FABRICATION OF HIGH FREQUENCY LOW LOSS MMIC CIRCUITS WITH SUPERCONDUCTOR ELECTRODES. THE SIX MONTH PHASE I PROGRAM WILL SIGNIFICANTLY BENEFIT FROM OUR RELATED WORK ON HTC SUPERCONDUCTOR DEPOSITION AND SINGLE CRYSTAL MULTILAYER ALXGA1-XAS/ALXGA1-XN DEPOSITIONS OVER SAPPHIRE SUBSTRATES. THE RESULTING FILMS WILL BE CHARACTERIZED FOR THEIR SUPERCONDUCTING TRANSITION TEMPERATURES. PHASE II WILL FOCUS ON THE FABRICATION OF INTEGRATED MMIC DEVICES.

* information listed above is at the time of submission.

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