HIGH THROUGHPUT X-PINCH SOFT X-RAY SOURCE FOR X-RAY LITHOGRAPHY

Award Information
Agency:
Department of Defense
Branch
Defense Advanced Research Projects Agency
Amount:
$248,083.00
Award Year:
1992
Program:
SBIR
Phase:
Phase II
Contract:
n/a
Agency Tracking Number:
13181
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Applied Pulsed Power
265 Irish Settlement Rd, Freeville, NY, 13068
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Steven Glidden
(607) 844-4633
Business Contact:
() -
Research Institution:
n/a
Abstract
X-RAY LITHOGRAPHY WILL BE USED IN THE FUTURE TO MAKE SEMICONDUCTOR DEVICES HAVING FEATURE SIZES OF <_.25 MICROMETERS. THE X-PINCH SOFT X-RAY SOURCE BEING DEVELOPED AT THE LABORATORY OF PLASMA STUDIES, CORNELL UNIVERSITY, APPEARS TO BE AN ATTRACTIVE SOURCE FOR LITHOGRAPHY FROM BOTH A CAPITAL COST AND THROUGHPUT STANDPOINT. CURRENT EXPERIMENTAL RESULTS INDICATE THAT A PROTOTYPE X-PINCH SOURCE DRIVEN BY A 550KA 80NS FWHM PULSED POWER GENERATOR IS CAPABLE OF RESIST EXPOSURE TIMES OF < 3 SECONDS OPERATING AT 1-10 PULSES PER SECOND AND CAN BE FABRICATED FOR UNDER $500,000. THE OBJECTIVE OF THIS PHASE I PROPOSAL EFFORT IS TO DESIGN A HIGH THROUGHPUT PROTOTYPE X-RAY SOURCE BASED ON CURRENT AND FUTURE RESULTS FROM THE X-PINCH EXPERIMENTS AT CORNELL UNIVERSITY. THE X-PINCH DRIVER POWER AND REPETITION RATE REQUIREMENTS WILL BE DETERMINED BY EXAMINING RESIST SENSITIVITIES AND MASK TO WAFER ALIGNMENT TOLERANCES. A DEVICE FOR REPLACING THE X-PINCH WIRE ARRAY UP TOTEN TIMES PER SECOND WILL BE DESIGNED. A PROTOTYPE REPETITION RATE PULSED POWER GENERATOR WILL BE DESIGNED. ANTICIPATED BENEFITS/POTENTIAL COMMERCIAL APPLICATIONS - SUCCESSFUL DEVELOPMENT OF THE X-PINCH SOURCE WOULD RESULT IN A COMPACT, INEXPENSIVE X-RAY SOURCE FOR LITHOGRAPHY. THIS WOULD PERMIT DEVELOPMENT OF A <_.25 MICROMETER FEATURE SIZE SEMICONDUCTOR MANUFACTURING FACILITY ON A SMALL SCALE WITH LOW INITIAL CAPITAL COSTS (IN COMPARISON WITH SYNCHROTRON SOURCES) WHICH COULD THEN BE INCREASED IN SIZE INCREMENTALLY AS TECHNOLOGIES AND MARKET DEMANDS DICTATE. KEY WORDS - LITHOGRAPHY, SEMICONDUCTOR TECHNOLOGY, X-RAY, X-PINCH, PULSED POWER.

* information listed above is at the time of submission.

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