HIGH THROUGHPUT X-PINCH SOFT X-RAY SOURCE FOR X-RAY LITHOGRAPHY

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: N/A
Agency Tracking Number: 13181
Amount: $49,588.00
Phase: Phase I
Program: SBIR
Awards Year: 1990
Solitcitation Year: N/A
Solitcitation Topic Code: N/A
Solitcitation Number: N/A
Small Business Information
Applied Pulsed Power
265 Irish Settlement Rd, Freeville, NY, 13068
Duns: N/A
Hubzone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Steven Glidden
 (607) 844-4633
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

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