FOURIER TRANSFORM INFRARED EMISSION TECHNIQUE FOR IN SITU DIAGNOSTICS FOR DIAMOND FILM GROWTH

Award Information
Agency:
Department of Defense
Branch
Defense Advanced Research Projects Agency
Amount:
$50,000.00
Award Year:
1992
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Agency Tracking Number:
17723
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Applied Science And
35 Cabot Road, Woburn, MA, 01801
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Lawrence Bourget
(617) 933-5560
Business Contact:
() -
Research Institution:
n/a
Abstract
THE AIM OF THIS PROJECT IS TO EVALUATE THE USE OF FOURIER TRANSFORM INFRARED (FTIR) EMISSION SPECTROSCOPY FOR CHARACTERIZING THE DIAMOND THIN FILM DEPOSITION PROCESS WITH IN SITU MEASUREMENTS. AN FTIR SPECTROMETER WILL BE INSTALLED ON A COMMERCIALLY-AVAILABLE DIAMOND REACTOR TO RECORD THE INFRARED RADIATION FROM A SILICON SUBSTRATE PASSING THROUGH A GROWING DIAMOND FILM AND THE REACTIVE PROCESSING GASES. THE PROJECT WILL FOCUS ON IN SITU MEASUREMENTS OF FILM THICKNESS AND GROWTH RATE, ABSORPTION IN THE FILM DUE TO C-H STRETCH, AND ABSORPTION BY THE REACTIVE GASES. IN SITU MEASUREMENTS OF THESE CHARACTERISTICS WILL LEAD TO RAPID DIAMOND THIN FILM PROCESS DEVELOPMENT FOR IMPORTANT APPLICATIONS, SUCH AS INFRARED OPTICS, HEAT SINKS, TOOL COATINGS, AND HIGH-QUALITY DIAMOND FOR ELECTRONIC DEVICES. ANTICIPATED BENEFITS/POTENTIAL APPLICATIONS - AN FTIR IN SITU DIAGNOSTIC TOOL FOR MONITORING AND CONTROLLING DIAMOND THIN FILM PROCESSING WILL LEAD TO SHORTER PROCESS DEVELOPMENT CYCLES FOR MANY DIAMOND APPLICATIONS, INCLUDING THE PRODUCTION OF HEAT SINKS AND TOOL COATINGS. IN SITU MONITORING WILL ALSO ENSURE THAT HIGH QUALITY DIAMOND IS REPRODUCIBLY MANUFACTURED FOR PRODUCTION OF INFRARED WINDOWS AND OTHER OPTICAL APPLICATIONS.

* information listed above is at the time of submission.

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