PROCESSING FOR BURIED METALLIZATION IN DIAMOND FILM

Award Information
Agency:
Department of Defense
Branch
Navy
Amount:
$70,144.00
Award Year:
1994
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
25676
Agency Tracking Number:
25676
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Applied Sciences, Inc. (Currently Applied Sciences)
141 West Xenia Ave, Po Box, 579, Cedarville, OH, 45314
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Jyh-ming Ting
(513) 766-2020
Business Contact:
() -
Research Institution:
n/a
Abstract
Due to the lack of techniques for buried metallization in PD or multilayer metallized PD, diamond has not been used as a material for electronic packaging. The primary obstacle in buried metallization in PD or producing multilayer metallized PD is the difficulty in generating good bonding between PD and selected metals, especially copper. It is proposed to develop the requisite technology using a combination of state-of-the-art methods for CVD diamond growth and ion processing. The enabling technology to be demonstrated in the Phase I research is the ability to create good adhesion between metal layers and PD, and the ability to nucleate and grow diamond over metallized PD. Well-bonded metal layers on the PD surface will be achieved using a combination of a substrate-biased diamond deposition technique, ion enhanced deposition, and multilayer metals including carbide formers. Deposition of diamond on metallized PD will be achieved by using similar combinations.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government