GALLIUM ARSENIDE ON SILICON FOR MICROELECTRONIC AND OPTOELECTRONIC INTEGRATED CIRCUITS

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$224,440.00
Award Year:
1989
Program:
SBIR
Phase:
Phase II
Contract:
n/a
Award Id:
7466
Agency Tracking Number:
7466
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Astrosystems Inc. (Currently ASTROPOWER, INC.)
30 Lovett Avenue, Newark, DE, 19711
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
James B Mcneely
() -
Business Contact:
() -
Research Institution:
n/a
Abstract
THE GROWTH OF DEVICE QUALITY, LARGE AREA GAAS EPITAXIAL LAYERS ON SILICON SUBSTRATES IS RECOGNIZED AS AN IMPORTANT TECHNOLOGICAL DEVELOPMENT. THE QUALITY OF HETEROEPITAXIAL LAYERS OF GAAS ON SILICON ARE LIMITED BY GAAS-SI LATTICE MISMATCH AND THERMAL COEFFICIENT MISMATCH. THE DEFECT DENSITY OF THE GAAS EPILAYER IS DIRECTLY RELATED TO THE INTERFACE AREA. OUR LABORATORIES HAVE DEMONSTRATED A VIABLE GAAS-SI GROWTH TECHNIQUE: SELECTIVE LIQUID PHASE EPITAXY, SLPE. THIS APPROACH ENHANCES THE EPILAYER QUALITY SINCE THE LATERAL OVERGROWTH REGION IS SHIELDED FROM DEFECTSORIGINATING AT THE INTERFACE. THE SUBSTRATE IS PREPARED BY PLACING A SILICON DIOXIDE LAYERON THE SILICON AND OPENING A SELECTIVE PATTERN IN THE OXIDE USING PHOTOLITHOGRAPHY. THE NUCLEATION VIAS WILL BE FIVE MICRONS WIDE AND ONE HUNDRED MICRONS LONG, PLACED ON FIFTY TO ONE HUNDRED MICRON CENTERS. AFTER NUCLEATION INTHE VIAS, LATERAL OVERGROWTH WILL YIELD DEVICE QUALITY GAAS ON SILICON. DIRECT CONTACT BETWEEN THE GAAS AND SILICON WILL BE LIMITED, WHICH WILL LIMIT LATERAL TENSION AND CONFINE DISLOCATION PROPAGATION TO THE VIA AREA.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government