Large Area Thin Film Silicon Carbide Using Zone Melt Synthesis and LPE

Award Information
Agency: Department of Defense
Branch: Missile Defense Agency
Contract: N/A
Agency Tracking Number: 18104
Amount: $50,000.00
Phase: Phase I
Program: SBIR
Awards Year: 1992
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Solar Park, Newark, DE, 19716
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Sandra Collins
 (302) 366-0400
Business Contact
Phone: () -
Research Institution
AstroPower is developing a new process for the growth of large area, thin film 3C-SiC using a proprietary deposition technique followed by liquid phase epitaxy (LPE). Successful development of the growth process will provide high quality, thin film SiC in typical silicon wafer areas, allowing compatibility with existing silicon circuit foundries for devices where SiC is the material of choice. New techniques will be used to control the crystallization of SiC on single crystal silicon and anneal out defects at the SiC/Si interface. LPE layers will form device active layers providing high quality material by further annealing growth defects and minimizing stress induced defects which plague state-of-the-art 3C-SiC on silicon. SiC offers a unique combination of properties that are ideal for semiconductor devices which operate at high temperatures or deliver high power at microwave frequencies and is a suitable material for the fabrication of wide bandgap LEDs and detectors.

* Information listed above is at the time of submission. *

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